Vacuum Equipment Repair and Rebuild
Controllers repaired. Pumps rebuilt.
We repair vacuum controllers and electronics and rebuild pumps and cryopumps.
What we repair and rebuild
Pumps, cryo and leak detectors
- Vacuum Pump Repair and RebuildEdwards, Leybold, Pfeiffer, Agilent/Varian, Alcatel/Adixen, Busch and Welch rotary vane, scroll, turbomolecular, diffusion, Roots and dry screw pumps.
- Cryopump and Cryo Compressor ServiceCTI-Cryogenics Cryo-Torr and On-Board cryopump rebuilds, helium compressor rebuilds, and cryo controllers and monitors.
- Helium Leak DetectorsAgilent, Alcatel/Pfeiffer ASM, Leybold, INFICON and Edwards leak detectors.
- Look up a part number in Models and Part Numbers. If it is not listed, ask anyway.
Controllers and electronics
- Turbo Pump Controller RepairPfeiffer/Balzers, Agilent/Varian, Leybold, Alcatel/Adixen, Edwards and Seiko Seiki controllers, plus Pfeiffer TPS and Alcatel MAG POWER supplies.
- Vacuum Gauge Controller RepairGranville-Phillips, Agilent/Varian, INFICON, MKS/HPS, Perkin-Elmer and Veeco gauge controllers.
- Deposition Controller RepairINFICON and Airco Temescal thin-film deposition controllers and rate monitors.
- Power Supply and Industrial Electronics RepairArtesyn and Popbridge supplies, switching, high-voltage and lens supplies, and controller boards.
Helium Leak Detectors
We take helium mass spectrometer leak detectors.
Agilent/Varian 936 through 979 and HLD series; Alcatel/Adixen and Pfeiffer ASM series (ASM 142, 182, 310, 340 and others); Leybold Phoenix and UL series; INFICON; Edwards; Veeco/VIC.
We service the ion source and filaments, the internal turbo and backing pumps, the valve block and seals, and the control electronics.
What usually brings one in:
- A filament warning, or both filaments gone
- A helium background that stays high and dulls sensitivity
- A unit that will not calibrate
More than repair
We also calibrate, service lab equipment and take on system-level work.
Get a quote
Email info@hsdengineering.com or call (510) 553-9132. Tell us who made it, the model and what it does wrong, and we will quote it.
Shipping, warranty and payment: Repair Process and Terms.