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Models and Part Numbers

Controllers, gauges, supplies and pumps

Models and part numbers we have serviced, by type and brand. Not every unit we take is listed. If it is not listed, ask anyway.

Found yours? Email info@hsdengineering.com or call (510) 553-9132 with what the unit is, and we will quote it.

Turbo pump controllers

Pfeiffer / Balzers turbo controllers and power supplies

  • TC 110: PM C01 790, PM C01 790 A (PMC01790, PMC01790A)
  • TC 400: PM C01 800 A, PM C01 805 A (PMC01800A, PMC01805A)
  • TC 600: PM C01 720, PM C01 690 C, PM C01 690 CA (PMC01720, PMC01690C, PMC01690CA)
  • TC 750: PM C01 712, PM C01 713 (PMC01712, PMC01713)
  • TCP 040: PM C01 229 (PMC01229)
  • TCP 120: PM C01 471 A, PM C01 473, PM C01 478, PM C01 479 (PMC01471A, PMC01473, PMC01478, PMC01479)
  • TCP 121: PM C01 475, PM C01 475 A, PM C01 497 A (PMC01475, PMC01475A, PMC01497A)
  • TCP 300 / TCP 310: PM C01 250, PM C01 259, PM C01 520, PM C01 552 (PMC01250, PMC01259, PMC01520, PMC01552)
  • TCP 350: PM C01 740 (PMC01740)
  • TCP 380: PM C01 490, PM C01 490 A, PM C01 680, PM C01 680 A, PM C01 681 A (PMC01490, PMC01490A, PMC01680, PMC01680A, PMC01681A)
  • TCP 600: PM C01 320, PM C01 320 A, PM C01 320 B, PM C01 320 C (PMC01320, PMC01320A, PMC01320B, PMC01320C)
  • DCU 100: PM C01 694 (PMC01694)
  • DCU 200: PM C01 695 B, PM C01 695 C (PMC01695B, PMC01695C)
  • DCU 300: PM C01 696 A, PM C01 696 B, PM C01 696 H (PMC01696A, PMC01696B, PMC01696H)
  • DCU 310: PM C01 822 (PMC01822)
  • DCU 600: PM C01 697 B, PM C01 697 CA (PMC01697B, PMC01697CA)
  • DCU display unit: PM 041 816 BT (PM041816BT)
  • TPS 110: PM 061 340 T (PM061340T)
  • TPS 200: PM 041 814 T (PM041814T)
  • TPS 600 power supply: PM 041 815 AT (PM041815AT)
  • Also serviced: TCP 5000, DCN series

Agilent / Varian turbo controllers

  • TV-401/301 Navigator: 9698979M005, 9698979M003, 9698979M002, 1028752R
  • TV-301 / Turbo-V 301: SQ339, SQ305, 9698973M006, 9698973M010, 9698973M017, 9698973M019, 9698973M020, 9698973S014, 9698973S016, 9698972M008, 9698972M009, 9698972M011
  • TV-301 AG Navigator: 9698991, 9698992
  • TV-301 AG rack controller: 9699537, 9699537S004
  • TV 304: X3507-64003
  • TV-801 / Turbo-V 801: SQ337, EXSQ337
  • TV-80: 969-9511, 969-9512
  • TV-81 AG: 9698996 M001, 9698988
  • TV-701: 9698977
  • TV-1000 ICE: 9699547S004, 9699547S009
  • Turbo-V 60: 9699501, 9699841
  • Turbo-V 70: 9699505
  • Turbo-V 70 control unit: 9699506S002, 9699507S003
  • Turbo-V 250: 9699523, 9699523S012, 9699423, 9699425, 9699437
  • Turbo-V 550: 9699544, 9699544S005, 9699444S012, 9699444S018
  • Turbo-V 700 HT: 9699445
  • Turbo-V 700 ICE: 9699546S001, 9699546S002
  • Turbo-V 1001: 9698978M001
  • Turbo-V 1K-G
  • TwisTorr 304 FS AG: X3506-64002, X3506-60012
  • TwisTorr controller: X3501-64016
  • Also serviced: V-60, V-70, V-80, V-200, V-250, V-300HT, V-450, V-550, V-1800, U81AG, U301AG

Leybold Turbotronik and Turbo.Drive controllers

  • Turbotronik NT 10: 85600
  • Turbotronik NT 20: 85720, 85721, 85562
  • Turbotronik NT 50
  • Turbotronik NT 150/360: 85472-1, 85472-3, 85472-6
  • Turbotronik NT 151/361: 85715, 85718, 85719, 85574, 86400
  • Turbotronik NT 361
  • Turbotronik NT 340 M: 85730, 85731, 85732, 85571, 85575, 85576, 85570, 899242
  • Turbotronik NT 450
  • Turbotronik NT 1000/1500: 855 78 13, 855 78 14 (8557814)
  • Turbo.Drive TD 300: 800072V0001
  • Turbo.Drive TD 400: 800073V0002, 800073V0003, 800073V0009
  • Turbo.Drive TDS: 800070V0003
  • Turbo.Drive TDS RS485: 800070V0003, 800072V0003
  • Turbo.Drive TDL 700/690: 800076V0001
  • Turbo.Drive S
  • TW 700 L: 800071V0002
  • MAG.DRIVE 2000: 121 35
  • Also serviced: NT 340, TP-400, Leybold/Balzers badged units

Alcatel / Adixen turbo controllers and power supplies

  • CFF 450: 8220, 8220HK
  • CFV 100: 8525
  • ACT 100
  • ACT 200T: 101923, 101932
  • ACT 200TH: 200004
  • ACT 202H
  • ACT 600T: 111692, 102017
  • ACT 1300M: 112123
  • ACT 2300: 112745
  • Mag-drive water-cooled controller: 112745
  • MAG POWER supply: 109542, 120917
  • EA turbo vent controller
  • Also serviced: ACT series, CFF-100, CFV-10, CFV-900, Drytel pumping stations

Edwards / Seiko Seiki turbo controllers

  • EXC 100E: D39620000, D39622000, D39624000
  • EXC 100L: D39620000, D39622000
  • EXC 120: D39616000
  • EXC 300: D39614000
  • STP control unit: SCU-A2203LVS
  • SCU-350
  • SCU-750
  • SCU-800
  • SCU-1600

Ion gauge and vacuum gauge controllers

Granville-Phillips gauge controllers

  • 307: 307001, 307004, 307005, 307006, 307090, 307215, 307392, 307501-D1B-T1, 307502-01B-T1, 307508-01B-T1
  • 330: 330001, 330002, 330020
  • 350: 350001, 350018, 350501-G-T1, 350504-F-T1, 350507, 350508-F-T1
  • 270: 270002, 270004, 270059
  • 275 Convectron: 275102
  • 280: 280027, 280038
  • 303: 303001, 303007
  • 340 / 341 MFC controller: 340001, 340501-T1, 341578, 341579
  • 352: 352001, 352018
  • 358 Micro-Ion: 358501-B00-T1, 358501-B10-T1, 358501-000-T1, 358501-010-T1
  • 360 / 370 Stabil-Ion: 360101, 360501-A1B-T1
  • 392: 392026-2-YG-T
  • Also serviced: 260, 271, 316, 341, 375

Other gauge controllers and readouts

  • Agilent / Varian Multi-Gauge: L8350-301
  • Agilent / Varian SenTorr
  • Agilent / Varian 843: 843-302
  • Agilent / Varian 844: 844-301
  • Agilent / Varian vacuum process controller: 980-6100
  • Agilent / Varian, also serviced: 831, 836, 840, 841, 842, 845, 845-CVT, 860, 880
  • MKS Type 290: 290-01, 290B-01
  • MKS Type 247 readout: 247C, 247D
  • MKS/HPS 919
  • INFICON BPG400 gauge, model 990
  • INFICON CC3, CM3, IG3, PG3
  • Perkin-Elmer: Wide Range, 600 Series, DGC-III, Monitorr 300
  • Veeco: RG-1000, RG-1002, APC-1000

Deposition controllers

  • INFICON IC-5: 760-500-G2
  • INFICON XTC/2
  • Airco Temescal VersaVac 2 and 5: 0511-0164-1
  • Also serviced: INFICON IC-6000, IC-4, XTC, XTM, XMS-1, XMS-3

Cryogenic controllers and monitors

  • CTI-Cryogenics On-Board computer controller
  • CTI-Cryogenics 8042 analog temperature indicator
  • CTI-Cryogenics Digital Regen controller
  • Varian digital temperature monitor
  • Austin Scientific 320 cryopump monitor

Power supplies and electronics

  • Artesyn NAN40-7624 24 V supply: 514807 Rev E
  • Popbridge E225107A supply
  • HVPS high-voltage supply
  • Lens power supply: 1000000611
  • Beckman Coulter J6-MI centrifuge motor
  • Pfeiffer TPS and Alcatel MAG POWER supplies: listed under Pfeiffer and Alcatel Adixen.

Pumps, cryopumps and leak detectors

Vacuum pumps we rebuild

  • Oil-sealed rotary vane: Edwards E1M, E2M, RV series; Leybold Trivac D and Trivac B; Pfeiffer DUO and UNO; Alcatel/Adixen 2005 to 2063 and Pascal; Welch DuoSeal; Busch R5
  • Dry scroll: Edwards XDS and nXDS; Agilent IDP and TriScroll; Leybold ScrollVac; Anest Iwata ISP
  • Turbomolecular: Pfeiffer HiPace, TMH and TMU; Edwards EXT, STP and nEXT; Leybold TurboVac and MAG; Agilent/Varian Turbo-V and TwisTorr; Alcatel/Adixen ATP and ATH; Osaka and Seiko Seiki
  • Diffusion: Varian/Agilent, Edwards, Leybold, CVC
  • Roots blowers and boosters: Edwards, Leybold, Stokes, Roots, Aerzen, Kinney
  • Dry screw and multi-stage Roots: Edwards iH and GX, Ebara, Kashiyama, Busch COBRA, Hanbell

Cryopumps and helium compressors

  • Cryopumps: CTI-Cryogenics Cryo-Torr 4, 4F, 8, 8F, 10, 400, 500; On-Board 4, 4F, 6, 8, 8F, 10, 10F, 400; On-Board waterpumps CP350 and CP1050
  • Helium compressors: CTI-Cryogenics SC and SC/W, 8200, 8300, 8500, 8510, 9600, 9700 series, 1020R/W

Helium leak detectors

  • Agilent/Varian 936 through 979 and HLD series; Alcatel/Adixen and Pfeiffer ASM series (ASM 142, 182, 310, 340 and others); Leybold Phoenix and UL series; INFICON; Edwards; Veeco/VIC

Get a quote

Email info@hsdengineering.com or call (510) 553-9132 with what the unit is, and we will quote it.

Quotes, turnaround, warranty and payment: Repair Process and Terms.

More than repair

We also calibrate, service lab equipment and take on system-level work.